Bruker
NPFLEX-1000
Bruker의 NPFLEX 3D 표면 계측 시스템은 정형외과 의료 임플란트와 같은 대형샘플 및 항공우주, 자동차 및 정밀가공 산업에서 가장 유연한 비-접촉성 3D 면적 표면의 특성을 분석합니다. 또한 NPFLEX는 접촉성 기기장치에서 가능했던 것 이상으로 데이터 밀도, 해상도 및 반복 가능성을 제공합니다.
| SPECIFICATIONS (NPFLEX) | ||
| Measurement Capability | Non-contact, 3D, surface roughness, critical dimension, film thickness, tribology | |
| Objectives | Super long working distance objectives: 2X, 5X, 10X, with crash mitigation assembly; Standard working distance objectives: 1.5X, 2.5X, 5X, 10X, 20X, 50X, 100X, 115X; Optional through transmissive media objective kits; Optional four-position turret | |
| Field of View Multipliers | 0.55X, 0.75X, 1X, 1.5X, 2X; Auto-sensing motorized selector, discreet zoom | |
| Light Source | Long-lifetime green and white LEDs | |
| Measurable Sample Dimension | 350 mm H (249 mm with automated stage); 304 mm D; 304 mm W | |
| Stage Weight Load Capacity | ≤50 kg (110 lbs) | |
| Air Table Weight Load Capacity | 77 kg (170 lbs) | |
| Optical Assembly | Integrated computer-controlled illuminator; Closed-loop precision vertical scanner | |
| Camera Options | Standard resolution monochrome camera; Standard resolution color camera; High-resolution monochrome camera | |
| Vertical Resolution | <0.1 nm *As demonstrated by a Piezo PSI difference measurement on an SiC reference mirror, 10 averages per measurement and computed Sq. | |
| RMS Repeatability | 0.004 nm *As demonstrated by taking the one sigma Sq value of 30 PSI repeatability measurements on an SiC reference mirror. | |
| Step Height | 0.75% accuracy; <0.12% 1 sigma repeatability | |
| Lateral Spatial Sampling | Camera and optics dependent | |
| Optical Resolution | 0.33μm *Based on Sparrow Criteria at 535 nm, 115X objective. | |
| Field-of-View | 7.68 × 5.76 mm max, larger with stitching | |
| Footprint | 172 cm H x 77 cm D x 81 cm W (67.6 in. H x 30.4 in. D x 32 in. W) | |
| Certification | CE, NRTL, T-Mark, ROHS compliant, ANSI B46.1 compliant | |