Bruker

ContourGT SERIES

Contour GT-K


- 배율과 무관한 최고의 Z-해상도 및 넓은 관측 범위

- 능률적인 인터페이스와 직관적 Workflow

- 최적화된 실시간 자동 측정


Contour GT-I


- 세계 최초로 Tip/Tilt Head를 갖춘 
   완전 자동 Benchtop 솔루션

- 거친 표면에서도 나노미터 단위의 측정 가능

- 통합적 공기 분리 및 높은 안정성

Contour GT-X


- 특허받은 dual-LED light source가 장착된 
   독특한 측량 센서 디자인

- 가장 빠르고 쉬운 나노미터 단위 측정

- 더욱 강력한 측정 및 분석력


SPECIFICATIONS COMPARISON



FEATURES
ContourGT-K
ContourGT-I
ContourGT-X

Max. Scan Range
>10 mm



RMS Repeatability (PSI)
<0.03 nm; 0.02 nm typical

<0.03 nm; 0.02 nm typical (motor)*;
0.004nm (PZT)

Lateral Resolution
0.38 μm min (Sparrow criterion);
0.26 μm (with AcuityXR®)



Step Height Accuracy
<0.75% Absolute accuracy for step heights
8 μm and greater



Step Height Repeatability
<0.1% 1 sigma repeatability



Max Scan Speed
47 μm/sec (with standard camera)
73 μm/sec (with standard camera)
114 μm / sec (with standard camera)

Sample Reflectivity
0.05% - 100%



Max. Sample Slope
Up to 40° (shiny surfaces);
Up to 87° (rough surfaces)



Sample Height
Up to 100 mm (4 in.)
Up to 100 mm (4in.) standard;
Up to 150 mm (6in.) option
Up to 100 mm

Sample Weight
Up to 4.5 kg (10 lb)
Up to 10 kg (22lb)
Up to 23 kg (50 lb)

XY Sample Stage
150 mm (6 in.) manual or automated option
150 mm (6in.) automated
300 mm (12in.) automated; 0.5 μm encoders

Z focusing
N/A100 mm (4in.) automated


Tip/Tilt Function
±6° manual in stage
±5° automated in head
±6° automated in head

Optical Metrology Module
Patented dual-LED illumination;
Single-objective adapter;
Optional automated or manual turret;
Single or auto zoom lenses
Patented dual-LED illumination;
Single-objective adapter or automated turret; Single or auto zoom lenses
Patented dual-LED illumination;
Single-objective adapter;
Optional automated or manual turret

Objectives
Parfocal: 2.5x, 5x, 10x, 20x, 50x, 115x
LWD: 1.5x, 2x, 5x, 10x
TTM: 2x, 5x, 10x, 20x
Brightfield: 2.5x, 5x, 10x, 50x



Available Zoom Lenses
0.55x, 0.75x, 1x, 1.5x, 2x
0.55x, 0.75x, 1x, 1.5x, 2x,
auto-sensing modules


Camera
Standard monochrome: 640 x 480
High-resolution monochrome (option): 1280 x 860
Standard color (option): 640 x 480
High-resolution color (option): 1280 x 860

Standard monochrome: 640x480;
High-resolution monochrome (option): 1376x1032
Color (option): 640x480;
 High-resolution color (option): 1376x1032

XY Automation
Manual stitching standard;
 Automated stitching, scatter and grid automation standard with motorized XY stage
Automated stitching,
 scatter and grid automation


Calibration
Via traceable step standards

Via traceable step standards; Optional auto and continuous internal laser signal

System Footprint
450 mm (W) x 534 mm (D) x 632 mm (H)

852 mm (W) x 793 mm (D) x 1608 mm (H)