Bruker
ContourGT SERIES
Contour GT-K
- 배율과 무관한 최고의 Z-해상도 및 넓은 관측 범위
- 능률적인 인터페이스와 직관적 Workflow
- 최적화된 실시간 자동 측정
Contour GT-I
- 세계 최초로 Tip/Tilt Head를 갖춘
완전 자동 Benchtop 솔루션
- 거친 표면에서도 나노미터 단위의 측정 가능
- 통합적 공기 분리 및 높은 안정성
Contour GT-X
- 특허받은 dual-LED light source가 장착된
독특한 측량 센서 디자인
- 가장 빠르고 쉬운 나노미터 단위 측정
- 더욱 강력한 측정 및 분석력
| SPECIFICATIONS COMPARISON | ||||
| FEATURES | ContourGT-K | ContourGT-I | ContourGT-X | |
| Max. Scan Range | >10 mm | ← | ← | |
| RMS Repeatability (PSI) | <0.03 nm; 0.02 nm typical | ← | <0.03 nm; 0.02 nm typical (motor)*; 0.004nm (PZT) | |
| Lateral Resolution | 0.38 μm min (Sparrow criterion); 0.26 μm (with AcuityXR®) | ← | ← | |
| Step Height Accuracy | <0.75% Absolute accuracy for step heights 8 μm and greater | ← | ← | |
| Step Height Repeatability | <0.1% 1 sigma repeatability | ← | ← | |
| Max Scan Speed | 47 μm/sec (with standard camera) | 73 μm/sec (with standard camera) | 114 μm / sec (with standard camera) | |
| Sample Reflectivity | 0.05% - 100% | ← | ← | |
| Max. Sample Slope | Up to 40° (shiny surfaces); Up to 87° (rough surfaces) | ← | ← | |
| Sample Height | Up to 100 mm (4 in.) | Up to 100 mm (4in.) standard; Up to 150 mm (6in.) option | Up to 100 mm | |
| Sample Weight | Up to 4.5 kg (10 lb) | Up to 10 kg (22lb) | Up to 23 kg (50 lb) | |
| XY Sample Stage | 150 mm (6 in.) manual or automated option | 150 mm (6in.) automated | 300 mm (12in.) automated; 0.5 μm encoders | |
| Z focusing | N/A | 100 mm (4in.) automated | ← | |
| Tip/Tilt Function | ±6° manual in stage | ±5° automated in head | ±6° automated in head | |
| Optical Metrology Module | Patented dual-LED illumination; Single-objective adapter; Optional automated or manual turret; Single or auto zoom lenses | Patented dual-LED illumination; Single-objective adapter or automated turret; Single or auto zoom lenses | Patented dual-LED illumination; Single-objective adapter; Optional automated or manual turret | |
| Objectives | Parfocal: 2.5x, 5x, 10x, 20x, 50x, 115x LWD: 1.5x, 2x, 5x, 10x TTM: 2x, 5x, 10x, 20x Brightfield: 2.5x, 5x, 10x, 50x | ← | ← | |
| Available Zoom Lenses | 0.55x, 0.75x, 1x, 1.5x, 2x | 0.55x, 0.75x, 1x, 1.5x, 2x, auto-sensing modules | ← | |
| Camera | Standard monochrome: 640 x 480 High-resolution monochrome (option): 1280 x 860 Standard color (option): 640 x 480 High-resolution color (option): 1280 x 860 | ← | Standard monochrome: 640x480; High-resolution monochrome (option): 1376x1032 Color (option): 640x480; High-resolution color (option): 1376x1032 | |
| XY Automation | Manual stitching standard; Automated stitching, scatter and grid automation standard with motorized XY stage | Automated stitching, scatter and grid automation | ← | |
| Calibration | Via traceable step standards | ← | Via traceable step standards; Optional auto and continuous internal laser signal | |
| System Footprint | 450 mm (W) x 534 mm (D) x 632 mm (H) | ← | 852 mm (W) x 793 mm (D) x 1608 mm (H) | |